Depth-Resolved Cathodoluminescence Spectroscopy

Nanoscale - Resolved Electronic and Compositional Structure

Energy-dependent excitation depth enables probe of localized states, heterojunction band gaps, new interphases and ultrathin layers on a nm scale.

Surface, bulk, and interface probe capability

25 keV UHV SEM enables 3-dimensional nanoscale probe → Correlate with positron annihilation spectroscopy to identify nature of native point defects

  • L. J. Brillson, "Applications of Depth-Resolved Cathodoluminescence Spectroscopy," J. Phys. D: Appl. Phys. 45, 183001-183027 (2012). doi:10.1088/0022-3727/45/18/183001
  • L.J. Brillson, "Nanoscale Luminescence Spectroscopy of Defects at Buried Interfaces and Ultra-thin Films," J. Vac. Sci. Technol. B19, 1762-1768 (2001) and references therein.